Engagement. Proximity. Expertise.
EBARA Precision Machinery Europe (EPME) is part of the EBARA Group, headquartered and established in Germany since 1994. We distribute vacuum and turbomolecular pumps, gas abatement systems and semiconductor manufacturing equipment e.g. CMP tools and bevel polisher.
Generating a New Wave, Designing a New World
The EBARA Group has supported industry and social infrastructure that continue to change with the times and an evolving information society with technologies that generate a new wave in water, air, electronics, and energy. We remain dedicated to generating a new wave needed in a changing world and creating a better future filled with the richness of the mind and smiles.
EBARA at all Levels in the Process of Chip Manufacturing
Industries
EPME offers the best-in-class solutions for industries with the highest requirements. Focus on your core business – we will take care of the processes for vacuum, gas abatement and semiconductor manufacturing.
Do you have a question? We love to find answers.
Components
The EBARA components portfolio includes dry and turbo molecular vacuum pumps as well as gas abatement systems. Customers value the quality, stability and low cost of ownership.
How can we help you? We love to find solutions.
Overhaul
Pumps and accessories rework
Our fully equipped Service Centres located in Livingston, Scotland and in Dresden, Germany employ highly skilled vacuum engineers to maintain and refurbish our EBARA vacuum pumps. We also service 3rd party brands for example dry pumps, turbo pumps, scroll pumps, wet pumps and other associated products.
Overhaul ServiceDo you have a question? We love to find answers.
Systems
EBARA is a world market leader in CMP, electroplating and bevel polishing systems. Customers value the quality, stability and low cost of ownership.
Meet us
Let’s talk!
We are looking forward meeting you at several conferences, shows and networking events.
More information
Challenge and creativity
The driving force
Our brand statement reflects our entrepreneurial spirit, which is never satisfied with the status quo. Ahead stands for our leadership – always one step ahead of the competition. Beyond expresses our promise to exceed expectations of our stakeholders. That is our motivation day-by-day.
Read moreTechnology. Passion. Support our globe.
Watch the EBARA CORPORATION Brand Movie
Since 1912 EBARA is dedicated to drive the future of vacuum and semiconductor systems.
We support our globe.
Corporate Social Responsibility
The EBARA Group is also committed to social contribution activities with the focus being on technical and educational assistance in business fields related to water, air and the environment.
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