ZEN Japan roots EBARA peace of mind

Peace of mind

We care for your systems. We are a leading manufacturer of vacuum and semiconductor solutions used in the production of wafers, liquid crystals, solar cells and other products requiring advanced technology. With EBARA your processes run smoothly and efficient.

Engagement. Proximity. Expertise.

EBARA Precision Machinery Europe (EPME) is part of the EBARA Group, headquartered and established in Germany since 1994. We distribute vacuum and turbomolecular pumps, gas abatement systems and semiconductor manufacturing equipment e.g. CMP tools and bevel polisher.

colleagues and working together

> 240 employees in Europe & Israel

Our corporate culture is shaped by
our Japanese roots. In Europe we have colleagues from 28 nations.

On-site in Europe

EPME is located and presented in eight countries in Europe, Israel and Switzerland.

Environment protection, smart green, save our nature

Supporting our globe

We espouse a responsible approach and social responsibility.

EBARA at all Levels in the Process of Chip Manufacturing


EPME offers the best-in-class solutions for industries with the highest requirements. Focus on your core business – we will take care of the processes for vacuum, gas abatement and semiconductor manufacturing.

Do you have a question? We love to find answers.

How can we help you? We love to find solutions.


Pumps and accessories rework

Our fully equipped Service Centres located in Livingston, Scotland and in Dresden, Germany employ highly skilled vacuum engineers to maintain and refurbish our EBARA vacuum pumps. We also service 3rd party brands for example dry pumps, turbo pumps, scroll pumps, wet pumps and other associated products.

Overhaul Service

Do you have a question? We love to find answers.

Meet us

Let’s talk!

We are looking forward meeting you at several conferences, shows and networking events.

More information
Brand statement EBARA

Challenge and creativity

The driving force

Our brand statement reflects our entrepreneurial spirit, which is never satisfied with the status quo. Ahead stands for our leadership – always one step ahead of the competition. Beyond expresses our promise to exceed expectations of our stakeholders. That is our motivation day-by-day.

Read more

Technology. Passion. Support our globe.

Watch the EBARA CORPORATION Brand Movie

Please note: When you click “play” on a Youtube video, your cookies data will be transmitted to another country, in this case to Google, which is based in the US. The US has been deemed by the European Court of Justice as a country with an insufficient level of data protection according to EU standards (the EU-US Privacy Shield has been declared invalid). In particular, there is a risk that your data will be processed by US authorities, for control and for monitoring purposes, possibly also without any legal remedy.

Load video

Since 1912 EBARA is dedicated to drive the future of vacuum and semiconductor systems.

We support our globe.

Corporate Social Responsibility

The EBARA Group is also committed to social contribution activities with the focus being on technical and educational assistance in business fields related to water, air and the environment.

Read More
Japan roots environment protection support our globe

Are you looking for a challenge?