ZEN Japan roots EBARA peace of mind

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    Peace of mind

    We care for your systems. We are a leading manufacturer of vacuum and semiconductor solutions used in the production of wafers, liquid crystals, solar cells and other products requiring advanced technology. With EBARA your processes run smoothly and efficient.

    Engagement. Proximity. Expertise.

    EBARA Precision Machinery Europe (EPME) is part of the EBARA Group, headquartered and established in Germany since 1994. We distribute vacuum and turbomolecular pumps, gas abatement systems and semiconductor manufacturing equipment e.g. CMP tools and bevel polisher.

    colleagues and working together

    > 200 employees in Europe & Israel

    Our corporate culture is shaped by
    our Japanese roots. In Europe we have colleagues from 19 nations.

    On-site in Europe

    EPME is located and presented in eight countries in Europe, Israel and Switzerland.

    Environment protection, smart green, save our nature

    Supporting our globe

    We espouse a responsible approach and social responsibility.

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    Industries

    EPME offers the best-in-class solutions for industries with the highest requirements. Focus on your core business – we will take care of the processes for vacuum, gas abatement and semiconductor manufacturing.

    Semiconductors

    Analytical Instruments

    General Vacuum

    R&D

    Chemical Industry

    Photovoltaic

    LED Manufacturing

    All Industries

    Do you have a question? We love to find answers.

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    Components

    The EBARA components portfolio includes dry and turbo molecular vacuum pumps as well as gas abatement systems. Customers value the quality, stability and low cost of ownership.

    Dry vacuum pumps

    Solutions for various vacuum applications needed in different industries. With over 100 years of experience in pump technology.

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    Turbo molecular pumps

    Pumps with mechanical bearing and magnetically levitated rotors. Suitable for varied applications such as ultra-high vacuum.

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    Gas abatement solutions

    The G and the TND series are highly efficient universal abatement solutions. We care about a clean environment.

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    Integrated Solutions

    Benefits may include reduced costs for parts, efficient pump installation and simplified maintenance.

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    Engineering

    Our Applications Team develops adaptions and creates the best suited solution for vacuum pumps and abatement systems.

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    All Components

    How can we help you? We love to find solutions.

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    Overhaul

    Pumps and accessories rework

    Our fully equipped Service Centres located in Livingston, Scotland and in Dresden, Germany employ highly skilled vacuum engineers to maintain and refurbish our EBARA vacuum pumps. We also service 3rd party brands for example dry pumps, turbo pumps, scroll pumps, wet pumps and other associated products.

    Overhaul Service

    Do you have a question? We love to find answers.

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    Systems

    EBARA is a world market leader in CMP, electroplating and bevel polishing systems. Customers value the quality, stability and low cost of ownership.

    CMP systems and tools, semiconductors, chip manufacturing

    CMP Tools

    With our CMP tools we stand for high flexibility and productivity for 200mm and 300mm wafers. We are proud of a growing base of best-in-class performance of our F-REX200M2 and F-REX300X.

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    Substrate Plating

    Our electroplating tool, the UFP Ultra Fine Plating series, can be used for all thorough mask plating processes, as for redistribution and bumping in the wafer level packaging processes.

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    Wafer Bevel Polishing

    To remove damages to the wafer edge as the main source for wafer yield loss, we offer a tool that not only cleans but also reshapes the bevel to a specific profile by using a mechanical slurry-free process.

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    All Systems

    Meet us

    Let’s talk!

    We are looking forward meeting you at several conferences, shows and networking events.

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    Brand statement EBARA

    Challenge and creativity

    The driving force

    Our brand statement reflects our entrepreneurial spirit, which is never satisfied with the status quo. Ahead stands for our leadership – always one step ahead of the competition. Beyond expresses our promise to exceed expectations of our stakeholders. That is our motivation day-by-day.

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    Technology. Passion. Support our globe.

    Watch the EBARA CORPORATION Brand Movie

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    Since 1912 EBARA is dedicated to drive the future of vacuum and semiconductor systems.

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    We support our globe.

    Corporate Social Responsibility

    The EBARA Group is also committed to social contribution activities with the focus being on technical and educational assistance in business fields related to water, air and the environment.

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    Japan roots environment protection support our globe

    Are you looking for a challenge?

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    Virtual Tour Livingston

    Click and get more insights from our overhaul centre for vacuum pumps in Livingston. Established in 1993 we count over 375 years of overhaul competence with our employees. Great experience and best-in-class service for our customers.

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