The Vacuum Particle Trap has been engineered by Ebara engineers in Dresden, Germany. Fixed between the process chamber and the pump inlet, the vacuum particle trap protects the pump against contamination with particles.
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Vacuum Particle Trap
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More about abatement
Gas abatement technology: Unmatched efficiency and innovative solutions
Discover our comprehensive range of Gas Abatement Systems, meticulously designed to meet the stringent demands of engineers across various industries with no need for gas or fuel oil. Delve into the world of Ebara systems, get insights into what they are, their crucial role, different types, reliability, and the importance of selecting the right system for specific applications. Find out how sustainable Ebara abates gases!
An Introduction to Advanced Gas Abatement Solutions
Our Gas Abatement Systems represents the pinnacle of engineering tailored to industrial requirements. Engineers rely on them for their efficient removal of hazardous gases and particulate matter, safeguarding both the environment and personnel.
LA+ and its Applications
The wide range of application for LA+: :
ALD – PE-CVD – LP-CVD and Eching processes are the application range for our LA+ gas abatement system to reduce emissions.
LA+ is the space wonder in fabs:
LA+ solution is engineered to save space in the production fab up to the half of the normal size of common gas abatement systems. The height of 990 mm is really a big step forward to save space.
Reliability, Performance, Sustainability and Versatility
Our Gas Abatement Systems have been engineered for reliability, sustainability and performance. They operate efficiently, ensuring the complete removal of harmful gases and particulate matter, thus mitigating environmental impact. The versatility of these systems across various industrial applications is a testament to their adaptability.