Save costs and headaches

Fully oxidized Teos

No burner, no washer needed

The Dynox developed and manufactured by EBARA Precision Machinery Europe in Germany, is the most cost effective solution for pyrophonic gas abatement. With the integrated TEOS solution, oxidize pyrophonic gas compounds in exhaust gases from the semiconductor.

Your benefits at a glance

Sustainability:

• TEOS will be fully oxidized
• Lower explosive limit
• Minium dilution
• Eco-friendly without water or extra gas usage

Cost savings:

• No extra washer
• No extra burner

Technology:

• Developed, engineered & produced in Germany
• High safety level
• React highly flammable and pyrophonic gases

For orders

Technical Datasheet

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