Dresden, 14.11.2025
EBARA Precision Machinery presents new gas abatement model at Semicon Europe
Date: 2025/11/14
EBARA CORPORATION has launched the Model LA+ combustion-based exhaust gas abatement system, engineered to safely neutralize process gases in semiconductor manufacturing.
The semiconductor manufacturing industry increasingly employs a variety of specialized gases, making it essential not only to abate them safely but also to minimize reactive byproducts that can hinder continuous operation. By addressing these needs, EBARA has developed the new Model LA+, which enhances processing and durability performance over its predecessor, Model TND.
Achieving a high destruction and removal efficiency (DRE) of over 95% for hard-to-decompose gases like CF4, Model LA+ utilizes a newly developed dual-stage combustion burner. This innovation reduces byproduct adhesion within the gas processing chamber while also lowering NOx/COx emissions.
The unit’s height has been reduced by approximately 50% compared to previous models, allowing for more effective use of upper space in facilities. In addition to conventional fossil fuel, the Model LA+ lineup now includes a hydrogen fuel option for customers seeking more sustainable energy choices. Despite its compact form, the Model LA+ maintains the same high airflow capacity of 600L/min as the Model TND, ensuring optimal performance.
EBARA remains dedicated to addressing industry challenges with advanced technology, contributing to the further growth of the semiconductor sector, and supporting our long-term vision, “E-Vision2030,” which aims to enhance quality of life through innovation.
About EBARA
EBARA Precision Machinery Europe (EPME) GmbH, headquartered in Dresden, Germany, is the European sales and service company of EBARA Corporation Tokyo. EBARA is a leading global manufacturer of vacuum and semiconductor systems used to produce wafers, liquid crystals, solar cells and other high-tech products. EBARA Corporation was founded in 1912 by Issey Hatakeyama and employs over 21,000 people worldwide. With an annual turnover of over 866 bn Yen, EBARA is one of the two largest companies in the industry. EBARA supplies 16 of the top 20 manufacturers in the chip industry.
About EBARA Precision Machinery Europe
The EPME portfolio includes dry and turbomolecular vacuum pumps as well as modern gas abatement systems for the chemical industry, for example. In addition, EPME distributes state-of-the-art CMP tools, wafer bevel polishing and substrate coating systems for chip manufacturing. In 2021 EBARA opened its second modern overhaul centre for vacuum pumps in Dresden. EPME has been operating a vacuum pump overhaul centre in Livingston (UK) since 1994. EPME employs about 230 people from 28 nations in Europe and Israel.