Vacuum Pumps & Gas Abatement Systems:  Dry Vacuum Pumps, Turbomolecular Pumps, Gas Abatement Systems, Ozonizers, EPIX Filters         

Wafer Processing Systems:  Chemical Mechanical Polishing, Chemical Plating, Ultrafine Plating          

EBARA Precision Machinery products are manufactured at state-of-the-art production facilities in Fujisawa near Tokyo/Japan and on Kyushu Island. These facilities fully comply with ISO 9001 and ISO 14001 standards. EBARA´s products provide CE marking as required in the European market.