Dry Vacuum Pumps
EBARA is a world leader in the design and manufacture of "dry" mechanical vacuum pumps. EBARA Dry Vacuum Pumps provide a host of product enhancements including increased reliability, reduced clean room particulate load, low noise, low vibration, lower operating costs, and the lowest cost of ownership.
EBARA's Dry Vacuum Pumps are designed for all applications such as physical vapour deposition (PVD), chemical vapour deposition (CVD), low pressure chemical vapour deposition (LPCVD), plasma enhanced chemical vapour deposition (PECVD) and metal etch, among them the harshest known in the industry.
EBARA's Dry Vacuum Pumps are used for many applications in and outside the semiconductor industry where oil back streaming is unacceptable. Custom designs and broad product lines make an EBARA Dry Vacuum Pump the product of choice. EBARA offers broad product lines with many models to choose from.