Description
The EMT is a 5-axis magnetically levitated, hydrocarbon-free vacuum pump. Five major EMT types are available providing temperature control, corrosion resistance, ultra-low vibration and much more.
Core Benefits
Product Information
Application Range
Pumping speed
Models
EMT397M
EMT427M
EMT907M
EMT1307M
EMT2400M
Industries
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Applications for EMT
- EUV Lithography
- Micro-machining (MEMS)
- CD Line Width Measurement
- SEM/TEM Electron
- Microscopy
- Nano-technology
- XPS (X-ray Photoelectron Spectroscopy)
EMT Turbo Molecular Pump: Synonymous with Innovation and Efficiency
Dive into the world of advanced technology with the EMT Turbo Molecular Pump, designed to meet the exacting standards of high-tech manufacturing environments. A part of the elite range of Turbo Molecular Pumps, the EMT promises a series of features and benefits that set it apart in the competitive market.
Key Features that empower the EMT to stand tall in the industry:
- 5-Axis Magnetically Levitated Design: The core of its functionality is the 5-axis magnetically levitated structure, ensuring a hydrocarbon-free operation and delivering an impressive performance that is both eco-friendly and efficient.
- Temperature Control: One of the remarkable highlights of the EMT series is the superior temperature control feature. This enables the most energy-efficient management of temperature, promising optimum performance across various conditions.
- Corrosion Resistance: The pump exhibits an impressive resistance to corrosion, a feature that promises longevity and robust performance, even in challenging environments.
- Ultra-Low Vibration: Experience an operation that is smooth and almost silent, thanks to the ultra-low vibration technology incorporated in the EMT pump, a feature that guarantees stability and efficiency.
Benefits that Make a Difference
Choosing the EMT pump opens up a world of benefits that redefine efficiency and safety in manufacturing setups:
- Ultra-High Vacuum: The pump promises ultra-high vacuum conditions, facilitating processes in highly controlled environments, thus elevating the quality and precision of manufacturing outputs.
- Radiation Resistance: Be it with the integration of a PK board or the inherent radiation-resistant property, the EMT pump promises safety and durability, proving to be a reliable ally in high-tech manufacturing scenarios.
- Hydrocarbon-Free Operation: As a completely hydrocarbon-free solution, it showcases a commitment to clean and sustainable technology, enhancing the lifecycle and reducing maintenance demands.
- Installation Flexibility: The EMT pump grants the freedom of installation in any orientation, ensuring easy integration into various setups, thereby saving valuable time and resources.
- Adherence to Safety Standards: Upholding stringent safety standards, it promises a hassle-free and reliable operational cycle, standing guard against unforeseen complications.
Discover the Innovations with EMT
Brought to life with meticulous attention to detail and backed by a commitment to quality, the EMT Turbo Molecular Pump showcases the pinnacle of innovation in vacuum pump technology, standing as a testimony to EBARA’s prowess in bringing forth solutions that are tuned to perfection for a wide range of industrial applications. Invite innovation into your manufacturing setups with the EMT Turbo Molecular Pump, where technology meets efficiency to facilitate a future of seamless operations.
Success Story
Smart, clean and green.
The chemical industry profits from our integrated solution for the disposal of fluorine-containing gases through highly efficient and reliable gas abatement systems and vacuum pumps.
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