The genius

Excellent performance for wide range of medium duty applications.


The EV-L has no limits. Numerous applications use this model. Two types are available, with small footprints and pumping speeds of 10,000 and 18,000 l/min.

Core Benefits

High temperature modules

Corrosion proof

Zero maintenance

Wide range of applications

Fab space saving

Low consumable consumption

Product Information

Application Range

light harsh

Pumping speed

10.000 – 18.000 l/min




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Applications for EV-L

  • Physical Vapor Deposition (PVD)
  • Atomic Layer Deposition (ALD)
  • LED Manufacturing
  • Metal Etch
  • Poly Etch
  • Low Pressure Chemical Vapour Deposition (LPCVD)
  • Organic Light-emitting Diode (OLED)
  • Photovoltaics (PV)

Success Story

Smart, clean and green.

The chemical industry profits from our integrated solution for the disposal of fluorine-containing gases through highly efficient and reliable gas abatement systems and vacuum pumps.

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Best reliability in class. Best return on investment in class. 100% Peace of Mind