The genius

Excellent performance for wide range of medium duty applications.


The EV-L has no limits. Numerous applications use this model. Two types are available, with small footprints and pumping speeds of 10,000 and 18,000 l/min.

Core Benefits

High temperature modules

Corrosion proof

Zero maintenance

Wide range of applications

Fab space saving

Low consumable consumption

Product Information

Application Range

light harsh

Pumping speed

10.000 – 18.000 l/min




Do you need a quote?


Applications for EV-L

  • Physical Vapor Deposition (PVD)
  • Atomic Layer Deposition (ALD)
  • LED Manufacturing
  • Metal Etch
  • Poly Etch
  • Low Pressure Chemical Vapour Deposition (LPCVD)
  • Organic Light-emitting Diode (OLED)
  • Photovoltaics (PV)

Introducing the EV-L Dry Vacuum Pump

As you traverse the technological advancements in the realm of dry vacuum pumps, one product that unequivocally stands out is the EV-L, a representation of EBARA’s commitment to innovation and expertise in semiconductor system manufacturing. This pump is not just a device; it is an embodiment of flexibility and robustness, designed to cater to a myriad of applications. Let’s delve deeper to understand the intricacies that make the EV-L a preferred choice in the dry vacuum pump category.

A Spectrum of Applications Waiting to be Explored

Designed to cater to a broad spectrum of applications, the EV-L dry vacuum pump comes in two distinguished versions, offering pumping speeds of 10,000 and 18,000 l/min, respectively. This wide range of speeds not only signifies high efficiency but also ensures its applicability in different environments, be it in the production of wafers, liquid crystals, solar cells, or other high-tech products.

Designed to Withstand Extreme Environments

EBARA showcases its mastery in creating products that are synonymous with durability and resilience through the EV-L dry vacuum pump. Equipped with high-temperature modules, this pump is prepared to operate impeccably even in the most extreme environments. Moreover, its corrosion-proof nature ensures a long lifespan, standing as a testimony to EBARA’s dedication to quality and endurance.

Minimalistic Design with Maximized Output

The EV-L dry vacuum pump prides itself on its small footprint, a feature strategically incorporated to save fab space without compromising on performance. This design philosophy not only ensures that it seamlessly integrates into various setups but also stands as a beacon of optimized space utilization in the industry.

Ease of Use with Zero Maintenance

Delineating from the traditional paths, the EV-L requires zero maintenance, offering users a hassle-free experience. This feature, combined with low consumable consumption, not only ensures economic efficiency but also promises a seamless operation, highlighting its self-sufficient nature.

An Epitome of Flexibility

In the dynamic world of technology, flexibility is a trait that is much sought after. The EV-L dry vacuum pump stands tall in this regard, showcasing high flexibility, ready to meet the demands of a wide range of applications, and promising an experience that is both versatile and adaptable.

Success Story

Smart, clean and green.

The chemical industry profits from our integrated solution for the disposal of fluorine-containing gases through highly efficient and reliable gas abatement systems and vacuum pumps.

Read More

Are you interested in engineering?

100% Peace of Mind
Best reliability in class. Best return on investment in class. 100% Peace of Mind